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Specification for human interface for semiconductor manufacturing equipment
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Specification for human interface for semiconductor manufacturing equipment : ウィキペディア英語版
Specification for human interface for semiconductor manufacturing equipment
This specification is usually called SEMI〔http://www.semi.org/en/About〕 E95-0200 standard. It was originally published in February 2000, and the latest technical revision is SEMI E95-1101.〔http://ams.semi.org/ebusiness/standards/SEMIStandardDetail.aspx?ProductID=211&DownloadID=530〕
This standard addresses the area of processing content with the direct intention of developing common software standards, so that problems involving operator training, operation specifications, and efficient development can be resolved more easily.
==See also==
Semiconductor Equipment and Materials International

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